High temperature vacuum atmosphere furnace vacuum system

The vacuum system of high temperature vacuum atmosphere furnace is explained as follows.

1. The vacuum system is a diffusion pump unit: namely a diffusion pump + a rotary vane vacuum pump; By high vacuum diffusion pump, water baffle, rotary vane vacuum pumps, vacuum belt charging valve, high vacuum pneumatic damper valve (the main valve), high vacuum pneumatic damper valve drainage valve, high vacuum pneumatic damper valve (outlet valve), before charging valve and pipeline connection pipe, sealing ring, compound vacuum gauge and extraction system of power distribution cabinets, etc.

2. The unit is not suitable for removing the gas that has corrosive effect on metal and chemical reaction on pump oil. It can be used as a high-vacuum acquisition device for high-tech equipment such as vacuum smelting, vacuum sintering, vacuum heat treatment, vacuum coating, vacuum brazing and space simulation experiment equipment. Working environment temperature 5~40℃, relative humidity not more than 85%, cooling water temperature 25℃+5℃.

3. The vacuum degree is related to the suction capacity of the vacuum pump, the tightness of the chamber and the air discharge volume of the materials inside the chamber (inner wall of the furnace, experimental devices, heat sink, etc.). The ultimate pressure of the unit is 1× 10-3Pa, the operating pressure is 1×10-2pa, and the extraction time is about 1 hour.

4, the diffusion pump can not be separate pumping, the pressure of the system should be reduced by the front pump to the pressure required by the diffusion pump to start, generally ≤ 10PA.

5. The inlet of the diffusion pump is equipped with a new water-cooled baffle, which can effectively prevent the oil vapor in the diffusion pump from flowing back into the vacuum chamber and avoid the pollution of the experimental instrument.

6. In order to prevent the vacuum oil in the front stage pump from flowing back into the diffusion pump chamber when the pump is stopped, the inlet of the vacuum in the front stage is required. The air port is equipped with solenoid valve, which will automatically isolate the system pipeline when the pump is stopped.

7, the valve adopts pneumatic way, easy to operate.

8, at the start of extraction, the system set in the drainage pipe, is pumped gas without diffusion pump and the backing pump directly, doing so can avoid being pumped container gas pollution of the diffusion pump (moisture, volatile matter, impurities), stay is pumped container pressure is reduced to 10 pa, closed drainage valve, open the damper valve, diffusion pump began to be smoked container start normal extraction.