Chemical vapor deposition laboratory furnace
Model | CVD-12TP |
Limiting temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | Suggestion 0~20℃/min |
Temperature zone | SINGLE,TWO, THREE FIVE AS your need |
Temperature accuracy | ±1℃ |
Chamber size | Φ60×1200(mm) |
Heating element | Imported alloy electric resistance wire |
Thermal couple | K Type (<1200.C) |
Temperature control | PID automatic control ,one set point control |
Heating curves | 30 segments programmable |
Chamber material | Imported high purity fiber |
Heating zone | 440mm |
Thermostatic zone | 200mm |
Tube material | high purity quartz glass |
Sealing type | stainless steel vacuum flange |
Tightness | 4.03*10-3Pa |
Main power | 2.5kw |
gas way | 3 gas can be connected |
A way range | 10-100ml/min |
B way range | 16-160ml/min |
C way range | 25-250ml/min |
Gasline pressure | -0.1-0.15Mpa |
System vacuum | 5-10Pa |
ump connection | KF16 stainless steel Bellows, KF16 clamps, KF16 flapper valve |
Vacuum meter | mechanical vacuum gauges, or electronic vacuum gauges |
Working voltage | 220V 50-60Hz |
Standard accessories | Quartz tube, vacuum flange, tube blockage, O-ring, protective gloves, crucible furnace hook, PTFE tube, stainless steel fittings, stainless steel bellows, adapter, 5mm hex wrench |
1. Upper and lower substructure, easy to take and release tube
2. High purity quartz tube, high temperature resistance 1200℃
3.30 segment programmable and PID automatic control.
4. You can choose the metal button or touch panel interface.
5. Imported energy-saving room materials.
6. The furnace adopts a double-lining structure, with clearance isolation in the middle. Even if the furnace temperature is up to 1000c, the surface of the furnace body can still be safely contacted.
