FB-300 oilless turbo molecular vacuum pump
Main technical parameter
Inlet flange | DN100CF | DN100LF | DN150CF | DN150LF |
Pumping | 180 | 600 | ||
Ultimate | 4×10-9 | 5×10-8 | 2×10-9 | 4×10-8 |
Compression | N2>108 | H2>5×102 | N2>109 | H2>8×103 |
Rotary speed (rpm) | 36000 | 24000 | ||
Startup time (min) | <6 | <6 | ||
Venting | KF25 | KF40 | ||
Cooling | Water Or Air | Water Or Air | ||
Recommended | 2L | 4L-8L | ||
Power consumption VA | <100 | <200 | ||
Mounting position | Vertical or Horizontal | Vertical ±5° | ||
Weight (Kg) | 8.5 | 30 | ||
DN200CF | DN200LF | DN250CF | DN250LF | DN400CF | DN400LF |
1200 | 1600 | 3500 | |||
2×10-9 | 4×10-8 | 2×10-9 | 4×10-8 | 5×10-9 | 5×10-8 |
N2>109 | H2>8×103 | N2>109 | H2>8×104 | N2>108 | H2>8×104 |
24000 | 24000 | 12600 | |||
<6 | <6 | <20 | |||
KF40 | KF50 | LF100 | |||
Water Or Air | Water | Water | |||
8L-15L | >15L | ZX70 JZJX-150 JZJX300 | |||
<200 | <300 | <400 | |||
Vertical ±5° | Vertical ±5° | Vertical ±5° | |||
36 | 40 | 102 | |||
