Hydrogen-Nitrogen Mixed Gas Reduction CVD Furnace
1700 ° C hydrogen reduction CVD furnace can be used for vacuumizing and filling atmosphere, so it is also called vacuum tube furnace and atmosphere tube furnace.
The tube is made of seamless high-purity alumina with a maximum operating temperature of 1650 ° C. In order to meet the test requirements of introducing hydrogen, the tube furnace is equipped with a manual ignition device at the right end of the furnace tube to ensure the safety of the test; the left side of the furnace tube is equipped with a vacuum gauge and a barometer to control the vacuum and atmosphere inside the furnace tube. The interlock of the solenoid valve with the pressure sensor and the combustible gas detection device ensures the further safety of the test.
The system also includes a two-channel rotameter with stainless steel needle valve and an air pressure gauge to accurately mix the gas meeting the test requirements. Usually, this set of instrument is used with two-stage rotary vane vacuum pump to realize the general low vacuum test environment. If you need a higher vacuum, you can contact our technicians to choose a more powerful molecular pump.
hydrogen reduction CVD furnace Application scope:
This equipment is widely used in material or chemical laboratory to sinter various new material samples under the condition of hydrogen or hydrogen nitrogen mixture.
Technical parameters of hydrogen reducing CVD furnace
Vacuum tube furnace | Max power | 2.5kw | |
Tube material | High purity alumina | ||
Tube diameter | 100mm | ||
Tube length | 1000mm | ||
Furnace chamber length | 440mm | ||
Heating zone length | 400mm | ||
Constant temperature zone | 200mm | ||
Operating temperature | 0~1650ºC | ||
Temperature control accuracy | ±1ºC | ||
Temperature control mode | 30 or 50 segment program temperature control | ||
Display mode | LCD | ||
Sealing method | 304 stainless steel vacuum flange | ||
Flange interface | 1/4" ferrule connector, KF16/25/40 joint | ||
Vacuum | 4.4E-3Pa | ||
Power supply | AC:220V 50/60Hz | ||
Ignition device | Manual ignition | ||
Gas supply system | Model | CY-2F | |
Gas channel | 2-channel | ||
Measuring unit | Gas float flowmeter | ||
Measuring range | A channel: 0~100ml H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. | |
B channel: 16~160ml N2 gas | |||
measurement accuracy | ±2.0% | ||
Pipe pressure resistance | 3MPa | ||
Working pressure difference | 50~300KPa | ||
Connecting pipe | 304 stainless steel | ||
Gas channel | 304 stainless steel needle valve | ||
Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
Exhaust system | Mechanical pump | Rotary vane pump | |
Pumping rate | 1.1L/S | ||
Exhaust interface | KF16 | ||
Vacuum measurement | Resistance gauge | ||
Ultimate vacuum | 1.0E-1Pa | ||
Power supply | AC:220V 50/60Hz | ||
Pumping interface | KF16 |